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Cihazlar

Device Name / Brand / Model
• Name: Contact Surface Profilometer (Stylus Profilometer)
• Brand: BRUKER
• Model: DEKTAK XT

Overview
The BRUKER DEKTAK XT is a stylus-based contact profilometer that enables physical measurement of two-dimensional (2D) surface topography. It is used for high-precision measurements such as film/coating thickness, step height, surface roughness, and surface profile characterization. With built-in vibration isolation, the system supports stable and repeatable measurements. (Note: The system status is tracked as “In operation”.)

Purpose / Output
• Contact (stylus) measurement of 2D surface profiles and topography
• Film/coating thickness and step-height measurements
• Surface roughness and profile analysis
• Broad sample compatibility with large measurement and sample-size capacity

Application Areas
• Thin-film/coating thickness measurements (optical coatings, metal/oxide films, etc.)
• Step-height measurement and process verification in micro/nanofabrication
• Surface roughness and topographic characterization
• Profile and morphology measurements in MEMS/microstructure processes

Highlights
• High-precision topography measurement with vertical resolution down to 1 Å
• Sample measurement range up to 150 mm (6”)
• Improved measurement stability supported by vibration isolation

Technical Specifications

Feature Value / Description
Measurement type 2D surface topography (physical/contact stylus measurement)
Digital magnification (vertical) 0.275 – 2.2 mm
Sample measurement range Up to 150 mm (6”)
Vibration isolation Available
Max sample thickness 50 mm (1.95”)
Max sample width 200 mm (8”)
Vertical range 1 mm (0.039”)
Vertical resolution 1 Å (@ 6.55 μm range)
Step-height repeatability 4 Å, 1 sigma (for steps ≤1 μm; 30 scans using a 12.5 μm stylus)
Usage note In operation

Contact / Service Request
For service requests: you may email [email protected]. (Please specify the sample type, purpose, and preferred date range.)