Boğaziçi CT3
Device Name / Brand / Model
• Name: Sputter Coating System (PVD – Sputtering)
• Brand: VAKSİS
• Model: ANGORA
Overview
The VAKSİS ANGORA is a thin-film coating system based on sputtering, one of the Physical Vapor Deposition (PVD) methods. It enables surface coating using a range of target materials such as copper, chromium, nickel, silicon, silicon dioxide, titanium, and tantalum. With 4-inch wafer compatibility, RF/DC bias options, substrate heating/cooling, and rotation, the system supports controlled and repeatable deposition processes. (Note: The system status is tracked as “In operation”.)
Purpose / Output
• Thin-film deposition via PVD sputtering
• Surface functionalization and process development using metal and dielectric targets
• Control of film properties via RF or DC substrate bias
• Improved coating uniformity using substrate heating/cooling and rotation
Application Areas
• Thin-film deposition steps in micro/nanofabrication (metal/dielectric layers)
• Coatings for sensor and MEMS manufacturing
• Electrode/interlayer deposition for electronic and optoelectronic components
• Surface modification, adhesion layers, and barrier coatings
Highlights
• Compatibility with 4-inch wafers for common cleanroom workflows
• Process flexibility with RF or DC substrate bias
• Controlled deposition with up to 500°C substrate heating, water cooling, and 1–30 rpm rotation
Technical Specifications
| Feature | Value / Description |
|---|---|
| Deposition method | PVD – Sputtering |
| Available targets | Cu, Cr, Ni, Si, SiO₂, Ti, Ta (and similar) |
| Base pressure | < 5 × 10⁻⁷ Torr |
| Substrate (wafer) size | 4" diameter |
| Substrate bias | RF or DC |
| Substrate heating | Up to 500 °C |
| Substrate cooling | Water cooling |
| Substrate rotation | 1 – 30 rpm |
| Number of targets | Four 2" targets |
| Control | Computer-based automatic control |
| Usage note | In operation |
Contact / Service Request
For service requests: you may email [email protected]. (Please specify the sample type, purpose, and preferred date range.)
